TIME-RESOLVED AND SPACE-RESOLVED SI LATTICE-TEMPERATURE MEASUREMENTS DURING CW LASER ANNEALING OF SI ON SAPPHIRE

被引：17

作者：

MURAKAMI, K

TOHMIYA, Y

TAKITA, K

MASUDA, K

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 06期

关键词：

D O I：

10.1063/1.95347

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：659 / 661

页数：3

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[2] MEASUREMENT OF LATTICE TEMPERATURE DURING PULSED-LASER ANNEALING BY TIME-DEPENDENT OPTICAL REFLECTIVITY
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[3] TIME-RESOLVED OPTICAL MEASUREMENT OF SI LATTICE TEMPERATURE DURING NANOSECOND PULSED LASER ANNEALING
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[4] MURAKAMI K, 1983, UNPUB P MRS S ENERGY
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[6] PYROMETRIC MEASUREMENT OF TEMPERATURE DURING CW ARGONION LASER ANNEALING AND THE SOLID-STATE REGROWTH RATE OF AMORPHOUS SI
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