GROWTH-RATES OF ALUMINUM ETCH TUNNELS

被引:62
作者
HEBERT, K [1 ]
ALKIRE, R [1 ]
机构
[1] UNIV ILLINOIS,DEPT CHEM ENGN,URBANA,IL 61801
关键词
D O I
10.1149/1.2095356
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
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页码:2447 / 2452
页数:6
相关论文
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