A STRUCTURE MARKER STUDY FOR PD2SI FORMATION - PD MOVES IN EPITAXIAL PD2SI

被引：11

作者：

LIEN, CD ^{[1
]}

NICOLET, MA ^{[1
]}

PAI, CS ^{[1
]}

机构：

[1] UNIV CALIF SAN DIEGO,LA JOLLA,CA 92093

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 02期

关键词：

D O I：

10.1063/1.334792

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：224 / 226

页数：3

共 50 条

[1] REORDERING OF POLYCRYSTALLINE PD2SI ON EPITAXIAL PD2SI
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