IR AND ELECTRICAL-PROPERTIES OF THIN SILICON OXYNITRIDE FILMS SYNTHESIZED BY ION-IMPLANTATION

被引：16
作者：
YADAV, AD
JOSHI, MC
机构：
来源：
THIN SOLID FILMS | 1982年 / 91卷 / 01期
关键词：
D O I：
10.1016/0040-6090(82)90122-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：45 / 53
页数：9
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