THE STATUS OF REFERENCE DATA, REFERENCE MATERIALS AND REFERENCE PROCEDURES IN SURFACE-ANALYSIS

被引：13

作者：

GRANT, JT

WILLIAMS, P

FINE, J

POWELL, CJ

机构：

[1] ARIZONA STATE UNIV,DEPT CHEM,TEMPE,AZ 85287

[2] NBS,DIV SURFACE SCI,GAITHERSBURG,MD 20899

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 13卷 / 01期

关键词：

D O I：

10.1002/sia.740130110

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：46 / 50

页数：5

共 13 条

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ANTHONY, MT ;

SEAH, MP .

SURFACE AND INTERFACE ANALYSIS, 1984, 6 (03) :95-106

[2]

FINE J, IN PRESS

[3]

LAREAU RT, 1985, APPLIED MATERIALS CH, V48, P273

[4] INSITU IMPLANTATION AND SIMS ANALYSIS OF D IN SI AND NBV USING AN ION MICROPROBE [J].

LOXTON, CM ;

LADNA, B .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :210-213

[5] THE DEVELOPMENT OF STANDARDS FOR SURFACE-ANALYSIS [J].

POWELL, CJ .

SURFACE AND INTERFACE ANALYSIS, 1988, 11 (1-2) :103-109

[6] CALIBRATION OF AUGER-ELECTRON SPECTROMETERS FOR ENERGY AND INTENSITY MEASUREMENT [J].

SEAH, MP ;

SMITH, GC ;

ANTHONY, MT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1221-1222

[7] DATA COMPILATIONS - THEIR USE TO IMPROVE MEASUREMENT CERTAINTY IN SURFACE-ANALYSIS BY AES AND XPS [J].

SEAH, MP .

SURFACE AND INTERFACE ANALYSIS, 1986, 9 (1-6) :85-98

[8] ONLINE ION-IMPLANTATION FOR QUANTIFICATION IN SECONDARY ION MASS-SPECTROMETRY - DETERMINATION OF TRACE CARBON IN THIN-LAYERS OF SILICON [J].

SMITH, HE ;

MORRISON, GH .

ANALYTICAL CHEMISTRY, 1985, 57 (13) :2663-2668

[9] QUANTITATIVE-ANALYSIS OF CHEMICAL VAPOR-DEPOSITION REFRACTORY-METAL SILICIDES [J].

STREIT, LA ;

WILLIAMS, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1979-1983

[10]

WAGNER CD, IN PRESS J PHYS CHEM

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