Laser machining of Si3N4 ceramics

被引：2

作者：

Burck, P

Wiegel, K

机构：

来源：

OPTICAL AND QUANTUM ELECTRONICS | 1995年 / 27卷 / 12期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Laser machining of ceramics is a promising alternative to diamond-based techniques. Technological problems and influencing factors are exemplified for the structural shaping of silicon nitride ceramics using Nd:YAG pulses of several hundred microseconds. Ablation rate and ablation geometry are discussed in relation to irradiation conditions and microstructure.

引用

页码：1349 / 1358

页数：10