ION-IMPLANTATION, DIFFUSION, AND SOLUBILITY OF ND AND ER IN LINBO3

被引：53
作者：
BUCHAL, C
MOHR, S
机构：
[1] Institut für Schicht-und Ionentechnik, D-5170, Jülich, Forschungszentrum-KFA
来源：
JOURNAL OF MATERIALS RESEARCH | 1991年 / 6卷 / 01期
关键词：
D O I：
10.1557/JMR.1991.0134
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have implanted Nd and Er ions into x- and z-cut LiNbO3 single crystals. Rutherford backscattering spectrometry and channeling shows the recrystallization of the host during annealing and the rare earth diffusion. Nd and Er have different solubilities and different diffusion constants in LiNbO3. The solubility is strongly temperature dependent. The diffusion is substitutional, fastest parallel to c-axis of the LiNbO3 crystal and characterized by an activation energy of approximately 3.6 eV.
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页码：134 / 137
页数：4
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