TRANSMISSION ELECTRON-MICROSCOPY STUDIES ON LATERAL REACTION OF GAAS WITH NI

被引:13
作者
CHEN, SH
CARTER, CB
PALMSTROM, CJ
OHASHI, T
机构
[1] CORNELL UNIV,DEPT MAT SCI & ENGN,ITHACA,NY 14853
[2] CORNELL UNIV,SCH ELECT ENGN,ITHACA,NY 14853
关键词
D O I
10.1063/1.96675
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:803 / 805
页数:3
相关论文
共 19 条
[1]  
CHEN LJ, 1983, 41ST P ANN M EMSA, P156
[2]  
CHEN LJ, 1984, MATER RES SOC S P, V31, P165
[3]  
Chen S. H., 1984, Materials Letters, V2, P469, DOI 10.1016/0167-577X(84)90075-2
[4]   TRANSMISSION ELECTRON-MICROSCOPY STUDIES ON THE LATERAL GROWTH OF NICKEL SILICIDES [J].
CHEN, SH ;
ZHENG, LR ;
CARTER, CB ;
MAYER, JW .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (02) :258-263
[5]  
CHEN SH, UNPUB ULTRAMICROSCOP
[6]  
CHEN SH, 1985, MATER RES SOC S P, V37, P635
[7]  
FINSTAD TG, 1982, 10TH NORD SEM M ELS
[8]   GROWTH-KINETICS OF PLANAR BINARY DIFFUSION COUPLES - THIN-FILM CASE VERSUS BULK CASES [J].
GOSELE, U ;
TU, KN .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (04) :3252-3260
[9]  
HREN JJ, 1979, INTRO ANAL ELECTRON, pCH18
[10]   EFFECT OF PHASE-SEPARATION ON THE ELECTRICAL-PROPERTIES OF THE INTERFACE BETWEEN NI-TA THIN-FILMS AND GAAS SUBSTRATE [J].
LAHAV, A ;
EIZENBERG, M .
APPLIED PHYSICS LETTERS, 1985, 46 (04) :430-432