MEASUREMENT OF GA AND AL IN A MOLECULAR-BEAM EPITAXY CHAMBER BY ATOMIC-ABSORPTION SPECTROMETRY (AAS)

被引:26
作者
KOMETANI, TY [1 ]
WIEGMANN, W [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 04期
关键词
D O I
10.1116/1.568703
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:933 / 936
页数:4
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