HIGH-POWER GLOW DISCHARGES

被引：2

作者：

FERNANDO, CE ^{[1
]}

ROWE, CJ ^{[1
]}

SWIFTHOOK, DT ^{[1
]}

机构：

[1] CENT ELECT GENERATING BOARD,MARCHWOOD ENGN LABS,SOUTHAMPTON SO4 4ZB,HAMPSHIRE,ENGLAND

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1975年 / 8卷 / 14期

关键词：

D O I：

10.1088/0022-3727/8/14/004

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L179 / L182

页数：4

共 50 条

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[40] Transport and ionization of sputtered atoms in high-power impulse magnetron sputtering discharges [J].

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