MONOLAYER RESOLUTION IN RUTHERFORD BACKSCATTERING SPECTROSCOPY

被引：8

作者：

KIMURA, K ^{[1
]}

OHSHIMA, K ^{[1
]}

NAKAJIMA, K ^{[1
]}

FUJII, Y ^{[1
]}

MANNAMI, M ^{[1
]}

GOSSMANN, HJ ^{[1
]}

机构：

[1] AT&T BELL LABS, MURRAY HILL, NJ 07974 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1995年 / 99卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(95)00041-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Conditions for to obtain monolayer resolution in Rutherford backscattering spectroscopy are discussed. It is shown that both high energy resolution and the grazing angle technique are essential to achieve monolayer resolution. A 90 degrees sector magnetic spectrometer (delta E/E similar to 0.1%) is utilized for high-resolution Rutherford backscattering spectroscopy (HRBS). Energy spectra of scattered 300-keV He ions from single crystals are measured with the spectrometer at grazing exit angles. The ions scattered from successive atomic layers can be resolved as separated peaks in the energy spectra. Results of some applications of HRBS are presented.

引用

页码：472 / 475

页数：4

共 13 条

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