PROFILE STRUCTURES OF VERY THIN MULTILAYERS BY X-RAY-DIFFRACTION USING DIRECT AND REFINEMENT METHODS OF ANALYSIS

被引：64
作者：
SKITA, V
FILIPKOWSKI, M
GARITO, AF
机构：
[1] UNIV PENN,RES STRUCT MATTER LAB,PHILADELPHIA,PA 19104
[2] UNIV PENN,DEPT BIOCHEM & BIOPHYS,PHILADELPHIA,PA 19104
[3] UNIV PENN,DEPT PHYS,PHILADELPHIA,PA 19104
[4] UNIV PENN,DEPT CHEM,PHILADELPHIA,PA 19104
来源：
PHYSICAL REVIEW B | 1986年 / 34卷 / 08期
关键词：
D O I：
10.1103/PhysRevB.34.5826
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：5826 / 5837
页数：12
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