POROSITY AND PORE-SIZE DISTRIBUTIONS OF POROUS SILICON LAYERS

被引：500
作者：
HERINO, R
BOMCHIL, G
BARLA, K
BERTRAND, C
GINOUX, JL
机构：
[1] CTR NATL ETUD TELECOMMUN,F-38243 MEYLAN,FRANCE
[2] ECOLE NATL SUPER ELECTROCHIM & ELECTROMET GRENOBLE,INST NATL POLYTECH GRENOBLE,CNRS,UNITE 413,F-38402 ST MARTIN DHERES,FRANCE
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 8A期
关键词：
D O I：
10.1149/1.2100805
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1994 / 2000
页数：7
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