TECHNIQUES FOR THE CORRECTION OF TOPOGRAPHICAL EFFECTS IN SCANNING AUGER-ELECTRON MICROSCOPY

被引：56
|
作者：
PRUTTON, M [1 ]
LARSON, LA [1 ]
POPPA, H [1 ]
机构：
[1] NASA,AMES RES CTR,STANFORD NASA JOINT INST SURFACE & MICROSTRUCT RES,MOFFETT FIELD,CA 94035
来源：
JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 01期
关键词：
D O I：
10.1063/1.331712
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：374 / 381
页数：8
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