MEASUREMENT OF THIN-FILM DISSOLUTION KINETICS USING A QUARTZ CRYSTAL MICROBALANCE

被引：83

作者：

HINSBERG, WD

WILLSON, CG

KANAZAWA, KK

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 07期

关键词：

D O I：

10.1149/1.2108932

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1448 / 1451

页数：4

共 20 条

[1]

BRUCKENSTEIN S, 1983, 1983 PITTSB C EXP AT

[2] ANALYSIS OF A QUARTZ CRYSTAL MICROBALANCE WITH COATINGS OF FINITE VISCOSITY [J].

CRANE, RA ;

FISCHER, G .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1979, 12 (12) :2019-2026

[3] RESPONSE OF A QUARTZ CRYSTAL MICROBALANCE TO A LIQUID DEPOSIT [J].

GLASSFORD, APM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (06) :1836-1843

[4] APPLICATIONS OF PIEZOELECTRIC CRYSTAL DETECTOR IN ANALYTICAL-CHEMISTRY [J].

HLAVAY, J ;

GUILBAULT, GG .

ANALYTICAL CHEMISTRY, 1977, 49 (13) :1890-1898

[5]

HOFER DC, 1982, P SOC PHOTO-OPT INST, V334, P196, DOI 10.1117/12.933577

[6] FREQUENCY OF A QUARTZ MICROBALANCE IN CONTACT WITH LIQUID [J].

KANAZAWA, KK ;

GORDON, JG .

ANALYTICAL CHEMISTRY, 1985, 57 (08) :1770-1771

[7]

KIM DJ, 1982, P KODAK MICROELECTRO, P100

[8] PIEZOELECTRIC-CRYSTALS AS DETECTORS IN LIQUID-CHROMATOGRAPHY [J].

KONASH, PL ;

BASTIAANS, GJ .

ANALYTICAL CHEMISTRY, 1980, 52 (12) :1929-1931

[9] INSITU MEASUREMENT OF DIELECTRIC THICKNESS DURING ETCHING OR DEVELOPING PROCESSES [J].

KONNERTH, KL ;

DILL, FH .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) :452-456

[10]

LU CS, 1984, APPLICATIONS PIEZOEL

← 1 2 →