PHYSICAL PROCESSES IN DEGRADATION OF AMORPHOUS SI-H

被引：22
|
作者：
REDFIELD, D [1 ]
机构：
[1] RCA LABS,PRINCETON,NJ 08540
来源：
APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 13期
关键词：
D O I：
10.1063/1.96687
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：846 / 848
页数：3
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