ELLIPSOMETER NULLING - CONVERGENCE AND SPEED

被引：5

作者：

CONFER, DL ^{[1
]}

AZZAM, RMA ^{[1
]}

BASHARA, NM ^{[1
]}

机构：

[1] UNIV NEBRASKA,ENGN RES CTR,ELECT MAT LAB,LINCOLN,NB 68508

来源：

APPLIED OPTICS | 1976年 / 15卷 / 10期

关键词：

D O I：

10.1364/AO.15.002568

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2568 / 2575

页数：8

共 11 条

[1]

Azzam R. M. A., 1973, Optics Communications, V7, P110, DOI 10.1016/0030-4018(73)90079-5

[2]

Azzam R. M. A., 1973, Applied Physics, V2, P59, DOI 10.1007/BF00934174

[3]

Azzam R. M. A., 1972, Optics Communications, V5, P5, DOI 10.1016/0030-4018(72)90124-1

[4] CHOICE OF COMPENSATOR AZIMUTH AND POSITION IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (05) :700-&

[5] ELLIPSOMETRIC MEASUREMENT OF POLARIZATION TRANSFER-FUNCTION OF AN OPTICAL SYSTEM [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (03) :336-&

[6] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&

[7] POLARIZATION TRANSFER-FUNCTION OF AN OPTICAL SYSTEM AS A BILINEAR TRANSFORMATION [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (02) :222-&

[8]

CONFER DL, 1973, THESIS U NEBRASKA

[9] A new calculus for the treatment of optical systems I. Description and discussion of the calculus [J].

Jones, RC .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1941, 31 (07) :488-493

[10]

KIDWELL W, 1969, ELECTRICAL INSTRUMEN

← 1 2 →