ELLIPSOMETER NULLING - CONVERGENCE AND SPEED

被引：5

作者：

CONFER, DL ^{[1
]}

AZZAM, RMA ^{[1
]}

BASHARA, NM ^{[1
]}

机构：

[1] UNIV NEBRASKA,ENGN RES CTR,ELECT MAT LAB,LINCOLN,NB 68508

来源：

APPLIED OPTICS | 1976年 / 15卷 / 10期

关键词：

D O I：

10.1364/AO.15.002568

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：2568 / 2575

页数：8

相关论文

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