PREPARATION OF ALUMINUM NITRIDE FROM ORGANOMETALLIC POLYMERIC PRECURSORS

被引:0
作者
LIAO, BX
LI, YK
LU, Y
机构
关键词
ALUMINUM NITRIDE; PRECURSOR; ORGANOALUMINUM; ORGANONITROGEN; FEATURE ARTICLE;
D O I
暂无
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The preparation of aluminium nitride from organometallic or polymeric precursors is reviewed, including reaction conditions for the synthesis of various intermediates and their transformation into aluminium nitride, and examples of structural characteristics and processing features. Organoaluminium and organonitrogen compounds, for the pyrolysis process, and polymers and copolymers, for the carbothermal process, are discussed. The emphasis is on recent progress.
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页码:117 / 127
页数:11
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共 62 条
[1]   COMPLEXES OF ORGANOALUMINUM COMPOUNDS .7. PREPARATION AND SPECTRA OF CIS-CYCLOTRI-MU-METHYLAMIDO-TRIS(DIMETHYLALUMINIUM) AND TRANS-CYCLOTRI-MU-METHYLAMIDO-TRIS(DIMETHYL-ALUMINIUM) AND SOME RELATED COMPOUNDS [J].
ALFORD, KJ ;
SMITH, JD ;
GOSLING, K .
JOURNAL OF THE CHEMICAL SOCIETY-DALTON TRANSACTIONS, 1972, (20) :2203-&
[2]  
AMATO CC, 1990, ADA218714
[3]  
ARMAS B, 1987, 10TH P INT C CVD, P1060
[4]   CHELATION IN ORGANOALUMINUM-NITROGEN CHEMISTRY [J].
BEACHLEY, OT ;
RACETTE, KC .
INORGANIC CHEMISTRY, 1976, 15 (09) :2110-2115
[5]  
BIRCHALL JD, 1988, Patent No. 284235
[6]  
Bolt J.D., 1989, US Patent, Patent No. [4,857,246, 4857246]
[7]  
BOLT JD, 1988, MATER RES SOC S P, V108, P337
[8]  
BOLT JD, 1988, Patent No. 4740574
[9]   Organometallic Azides as Precursors for Aluminum Nitride Thin Films [J].
Boyd, David C. ;
Haasch, Richard T. ;
Mantell, Daniel R. ;
Schulze, Roland K. ;
Evans, John F. ;
Gladfelter, Wayne L. .
CHEMISTRY OF MATERIALS, 1989, 1 (01) :119-124
[10]  
BRADLEY DC, 1989, Patent No. 331448