ARGON ENTRAPMENT IN METAL-FILMS BY DC TRIODE SPUTTERING

被引:50
作者
LEE, WWY [1 ]
OBLAS, D [1 ]
机构
[1] GTE LABS INC,WALTHAM,MA 02154
关键词
D O I
10.1063/1.321776
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:1728 / 1732
页数:5
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