SOURCES OF OXIDATION-INDUCED STACKING-FAULTS IN CZOCHRALSKI SILICON WAFERS

被引：44

作者：

ROZGONYI, GA ^{[1
]}

MAHAJAN, S ^{[1
]}

READ, MH ^{[1
]}

BRASEN, D ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

APPLIED PHYSICS LETTERS | 1976年 / 29卷 / 09期

关键词：

D O I：

10.1063/1.89174

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：531 / 533

页数：3

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