DESIGN AND PERFORMANCE ANALYSIS OF AN OPTICAL PROFILOMETER FOR STAND-OFF CONTROL

被引:2
作者
ABDULLAH, HA
CHATWIN, CR
机构
[1] Laser and Optical Systems Engineering Group, Department of Mechanical Engineering, University of Glasgow, Glasgow
关键词
D O I
10.1088/0957-0233/5/5/009
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A prototype non-contact high-bandwidth optoelectronic probe for surface topology and laser materials processing stand-off control is presented. Radiation from a low-power laser beam is focused onto a workpiece surface; the spatial variation in the reflected irradiance is modelled. A Gaussian beam and radiometric system model are investigated and compared with experimental results. The experimental results lie between the Gaussian and radiometric simulations which appear to be limiting cases. The system facilitates a measuring range of +/- 6 mm. A predicted performance is reported for the device. A set of experiments are performed, results are analysed and compared with the mathematical models. The approximate range of instrument linearity is +/- 1 mm for the 75 mm focal length main lens and +/- 2 mm for the 120 mm lens; in this linear range the optimal accuracy resolution is 1 mum.
引用
收藏
页码:517 / 525
页数:9
相关论文
共 16 条
  • [1] FAST VERSATILE OPTICAL PROFILOMETER
    ARECCHI, FT
    BERTANI, D
    CILIBERTO, S
    [J]. OPTICS COMMUNICATIONS, 1979, 31 (03) : 263 - 266
  • [2] A FAST OPTICAL PROFILOMETER
    BERTANI, D
    CETICA, M
    CILIBERTO, S
    [J]. OPTICS COMMUNICATIONS, 1983, 46 (01) : 1 - 3
  • [3] AUTOMATIC FOCUS CONTROL - THE ASTIGMATIC LENS APPROACH
    COHEN, DK
    GEE, WH
    LUDEKE, M
    LEWKOWICZ, J
    [J]. APPLIED OPTICS, 1984, 23 (04): : 565 - 570
  • [4] OPTICAL PROFILOMETER - A PRACTICAL APPROXIMATE METHOD OF ANALYSIS
    DOBOSZ, M
    [J]. APPLIED OPTICS, 1983, 22 (24): : 3983 - 3987
  • [5] OPTICAL PROFILOMETER - A NEW METHOD FOR HIGH-SENSITIVITY AND WIDE DYNAMIC-RANGE
    FAINMAN, Y
    LENZ, E
    SHAMIR, J
    [J]. APPLIED OPTICS, 1982, 21 (17): : 3200 - 3208
  • [6] SIMPLE OPTICAL NONCONTACT PROFILOMETER
    INDEBETOUW, G
    [J]. OPTICAL ENGINEERING, 1979, 18 (01) : 63 - 66
  • [7] KLEINKNECHT HP, 1985, RCA REV, V46, P34
  • [8] LEE WH, 1987, LASER OPTRONICS SEP, P85
  • [9] Meyer-Arendt J. R., 1972, INTRO CLASSICAL MODE
  • [10] MOLSINI G, 1984, OPT COMMUN, V49, P229