CHEMICAL ETCHING OF (100) GAAS IN A SULFURIC-ACID HYDROGEN-PEROXIDE WATER-SYSTEM

被引:20
作者
BARYCKA, I
ZUBEL, I
机构
[1] Technical Univ of Wroclaw, Wroclaw, Pol, Technical Univ of Wroclaw, Wroclaw, Pol
关键词
D O I
10.1007/BF01233125
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
10
引用
收藏
页码:1299 / 1304
页数:6
相关论文
共 10 条
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