CHEMICAL ETCHING OF (100) GAAS IN A SULFURIC-ACID HYDROGEN-PEROXIDE WATER-SYSTEM

被引：20
作者：
BARYCKA, I
ZUBEL, I
机构：
[1] Technical Univ of Wroclaw, Wroclaw, Pol, Technical Univ of Wroclaw, Wroclaw, Pol
来源：
JOURNAL OF MATERIALS SCIENCE | 1987年 / 22卷 / 04期
关键词：
D O I：
10.1007/BF01233125
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
10
引用
收藏
页码：1299 / 1304
页数：6
相关论文
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