ELECTRON-BEAM-INDUCED CURRENT INVESTIGATIONS OF OXYGEN PRECIPITATES IN SILICON

被引：11
|
作者：
JAKUBOWICZ, A
HABERMEIER, HU
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 03期
关键词：
D O I：
10.1063/1.336091
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1407 / 1409
页数：3
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