NEGATIVE-ION SOURCE (NIABNIS) AND PREPARATION OF TRANSPARENT CARBON-FILMS BY NEGATIVE CARBON ION-BEAM DEPOSITION

被引：25
作者：
ISHIKAWA, J
OGAWA, K
MIYATA, K
TSUJI, H
TAKAGI, T
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 21卷 / 2-4期
关键词：
D O I：
10.1016/0168-583X(87)90827-5
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：205 / 208
页数：4
相关论文
共 50 条
  • [31] HYDROGEN CONTENT AND BONDING STRUCTURE OF DIAMOND-LIKE CARBON-FILMS DEPOSITED BY ION-BEAM DEPOSITION
    TANAKA, K
    OKADA, M
    KOHNO, T
    YANOKURA, M
    ARATANI, M
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 58 (01) : 34 - 38
  • [32] TRANSPARENT CARBON-FILM PREPARED BY MASS-SEPARATED NEGATIVE-CARBON-ION-BEAM DEPOSITION
    ISHIKAWA, J
    TAKEIRI, Y
    OGAWA, K
    TAKAGI, T
    [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (07) : 2509 - 2515
  • [33] Beam optics optimization of a negative-ion sputter source
    F Osswald
    R Rebmeister
    [J]. Pramana, 2002, 59 : 795 - 804
  • [34] Beam optics optimization of a negative-ion sputter source
    Osswald, F
    Rebmeister, R
    [J]. PRAMANA-JOURNAL OF PHYSICS, 2002, 59 (05): : 795 - 804
  • [35] STABILITY OF A NEGATIVE-ION BEAM
    TURNBULL, RJ
    HOOPER, EB
    ANDERSON, OA
    ANDERSON, DV
    WILLMANN, PA
    [J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1977, 22 (09): : 1084 - 1084
  • [36] MULTICUSP NEGATIVE-ION SOURCE
    EHLERS, KW
    LEUNG, KN
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1980, 51 (06) : 721 - 727
  • [37] NEGATIVE-ION SOURCE CHARACTERIZATION
    VANEK, V
    GEKELMAN, W
    WONG, AY
    [J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1976, 21 (09): : 1031 - 1031
  • [38] NEGATIVE-ION SOURCE AND INJECTORS
    THOMSON, CSF
    [J]. VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1971, 26 (154): : 188 - &
  • [39] DUODEHCATRON NEGATIVE-ION SOURCE
    KLODY, GM
    RICHARDS, HT
    [J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1972, 17 (04): : 570 - &
  • [40] Development of heavy negative-ion sources and their application to ion implantation and ion beam deposition
    Ishikawa, J
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2006, 48 (04) : 703 - 710
12345