NEGATIVE-ION SOURCE (NIABNIS) AND PREPARATION OF TRANSPARENT CARBON-FILMS BY NEGATIVE CARBON ION-BEAM DEPOSITION

被引：25
作者：
ISHIKAWA, J
OGAWA, K
MIYATA, K
TSUJI, H
TAKAGI, T
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 21卷 / 2-4期
关键词：
D O I：
10.1016/0168-583X(87)90827-5
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：205 / 208
页数：4
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