MICROINHOMOGENEITIES IN GLOW-DISCHARGE DEPOSITED A-SI-H LAYERS

被引：8

作者：

ZENTAI, G

FUSTOSSWEGNER, M

机构：

[1] Central Research Inst for Physics, Budapest, Hung, Central Research Inst for Physics, Budapest, Hung

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1985年 / 77-8卷

关键词：

D O I：

10.1016/0022-3093(85)90644-1

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：225 / 228

页数：4

共 15 条

[1] THICKNESS AND TEMPERATURE-DEPENDENCE OF THE CONDUCTIVITY OF PHOSPHORUS-DOPED HYDROGENATED AMORPHOUS-SILICON
AST, DG
BRODSKY, MH
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1980, 41 (03): : 273 - 285
[2] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[3] HYDROGEN CONTENT OF A-GE-H AND A-SI-H AS DETERMINED BY IR SPECTROSCOPY, GAS EVOLUTION AND NUCLEAR-REACTION TECHNIQUES
FANG, CJ
GRUNTZ, KJ
LEY, L
CARDONA, M
DEMOND, FJ
MULLER, G
KALBITZER, S
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 255 - 260
[4] THICKNESS DEPENDENCES OF PROPERTIES OF P-DOPED AND B-DOPED HYDROGENATED AMORPHOUS-SILICON .2. ELECTRON-SPIN-RESONANCE, HYDROGEN VIBRATIONAL-SPECTRA AND OPTICAL-ABSORPTION
HASEGAWA, S
SHIMIZU, S
KURATA, Y
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1984, 49 (05): : 521 - 532
[5] THICKNESS DEPENDENCES OF PROPERTIES OF P-DOPED AND B-DOPED HYDROGENATED AMORPHOUS-SILICON .1. DARK CONDUCTIVITY AND PHOTOCONDUCTIVITY
HASEGAWA, S
SHIMIZU, S
KURATA, Y
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1984, 49 (05): : 511 - 519
[6] THICKNESS DEPENDENCE OF ELECTRICAL AND OPTICAL-PROPERTIES AND ELECTRON-SPIN-RESONANCE IN UNDOPED A-SI-H
HASEGAWA, S
IMAI, Y
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 46 (03): : 239 - 251
[7] HASEGAWA S, 1982, PHIL MAG B, V45, P285
[8] GROWTH-MORPHOLOGY AND DEFECTS IN PLASMA-DEPOSITED A-SI-H FILMS
KNIGHTS, JC
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 159 - 170
[9] DEPTH RESOLUTION AND RECOIL CROSS-SECTION FOR ANALYZING HYDROGEN IN SOLIDS USING ELASTIC RECOIL DETECTION WITH HE-4 BEAM
NAGATA, S
YAMAGUCHI, S
FUJINO, Y
HORI, Y
SUGIYAMA, N
KAMADA, K
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (03) : 533 - 537
[10] MICROSTRUCTURE AND PROPERTIES OF RF-SPUTTERED AMORPHOUS HYDROGENATED SILICON FILMS
ROSS, RC
MESSIER, R
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (08) : 5329 - 5339

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