PREPARATION CONDITIONS OF TRANSPARENT AND CONDUCTIVE SNO2 THIN-FILMS BY REACTIVE EVAPORATION

被引：18
作者：
LOUSA, A
GIMENO, S
MARTI, J
机构：
[1] Department de Física Aplicada i Electrònica, Universitat de Barcelona, E-08028 Barcelona
来源：
VACUUM | 1994年 / 45卷 / 10-11期
关键词：
D O I：
10.1016/0042-207X(94)90048-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Tin oxide thin films are deposited by reactive evaporation of tin in an oxygen atmosphere. Films deposited at different substrate temperatures, growth rates and oxygen partial pressures are characterized by scanning electron microscopy, X-ray diffraction, optical transmission and electrical conductivity, including Hall-effect measurements. Preparation conditions are optimized to obtain highly conductive and transparent SnO2 thin films.
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页码：1143 / 1145
页数：3
相关论文
共 7 条
[1]   SELECTIVE AREA LASER PHOTODEPOSITION OF TRANSPARENT CONDUCTIVE SNO2 FILMS [J].
KUNZ, RR ;
ROTHSCHILD, M ;
EHRLICH, DJ .
APPLIED PHYSICS LETTERS, 1989, 54 (17) :1631-1633
[2]   HIGHLY CONDUCTING AND TRANSPARENT SNO2 THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING ON LOW-TEMPERATURE SUBSTRATES [J].
MINAMI, T ;
NANTO, H ;
TAKATA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (03) :L287-L289
[3]  
Schlosser V., 1988, Eighth E.C. Photovoltaic Solar Energy Conference. Proceedings of the International Conference (EUR 11780), P998
[4]  
TAREY RD, 1985, THIN SOLID FILMS, V128, P181, DOI 10.1016/0040-6090(85)90070-7
[5]   PREPARATION AND CHARACTERIZATION OF SOME TIN OXIDE-FILMS [J].
UEN, TM ;
HUANG, KF ;
CHEN, MS ;
GOU, YS .
THIN SOLID FILMS, 1988, 158 (01) :69-80
[6]   PHYSICAL-PROPERTIES OF SPRAYED SNO2 FILMS [J].
VASU, V ;
SUBRAHMANYAM, A .
THIN SOLID FILMS, 1991, 202 (02) :283-288
[7]   PHYSICAL-PROPERTIES OF ARSENIC-DOPED TIN OXIDE THIN-FILMS [J].
VISHWAKARMA, SR ;
UPADHYAY, JP ;
PRASAD, HC .
THIN SOLID FILMS, 1989, 176 (01) :99-110
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