SELF-LIMITING MECHANISM IN THE ATOMIC LAYER EPITAXY OF GAAS

被引：59
|
作者：
TISCHLER, MA
BEDAIR, SM
机构：
来源：
APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 24期
关键词：
D O I：
10.1063/1.96804
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1681 / 1683
页数：3
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