HYDROGENATION AND DIRECT-SUBSTITUTIONAL DOPING OF EVAPORATED AMORPHOUS-SILICON FILMS

被引:13
|
作者
ISELBORN, S
RUBEL, H
GEIGER, J
SCHRODER, B
机构
关键词
D O I
10.1080/13642818308227556
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:561 / 569
页数:9
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