ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITION OF THIN METAL-FILMS FOR MICROELECTRONICS APPLICATIONS

被引：0
|
作者：
NORMAN, JAT [1 ]
机构：
[1] SCHUMACHER,CARLSBAD,CA 92009
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1995年 / 209卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：425 / INOR
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