PERFORMANCE STUDY OF A PRESSURE TRANSDUCER WITH MEANDERING-PATH THIN-FILM STRAIN-GAUGES

被引：6
|
作者：
NAYAK, MM [1 ]
RAJANNA, K [1 ]
MOHAN, S [1 ]
机构：
[1] INDIAN INST SCI,INSTRUMENTAT & SERV UNIT,BANGALORE 560012,KARNATAKA,INDIA
来源：
THIN SOLID FILMS | 1990年 / 193卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(90)90258-F
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The performance of a pressure transducer with meandering-path thin film strain gauges has been studied. Details of the procedure followed to prepare the thin film strain gauge system on the pressure transducer diaphragm are given. The effect of post-deposition heat treatment on the resistance of the sensing films of the strain gauges and the insulating base layers are discussed. The output of the pressure transducer was studied with various input pressures and excitation voltages. It was found that up to a maximum of 10 V bridge excitation the output was stable and repetitive. The maximum non-linearity and hysteresis observed are +/- 0.15%, +/- 0./16% and +/- 0.14% FSO (full-scale output) for 5, 7.5 and 10 V excitation respectively. Information on the output behaviour of the pressure transducer with temperature is also included.
引用
收藏
页码：1023 / 1029
页数：7
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