INFLUENCE OF AS-DEPOSITED FILM STRUCTURE ON (100) TEXTURE IN LASER-RECRYSTALLIZED SILICON ON FUSED QUARTZ

被引：25
作者：
KIMURA, M
EGAMI, K
机构：
来源：
APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 04期
关键词：
D O I：
10.1063/1.94770
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：420 / 422
页数：3
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