SURFACE AND TRACE ANALYSIS BY HIGH-RESOLUTION TIME-OF-FLIGHT SECONDARY ION MASS-SPECTROMETRY

被引：28
作者：
NIEHUIS, E
HELLER, T
JURGENS, U
BENNINGHOVEN, A
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词：
D O I：
10.1116/1.576009
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：1823 / 1828
页数：6
相关论文
共 20 条
[1]   SURFACE-ANALYSIS BY NONRESONANT MULTIPHOTON IONIZATION OF DESORBED OR SPUTTERED SPECIES [J].
BECKER, CH ;
GILLEN, KT .
ANALYTICAL CHEMISTRY, 1984, 56 (09) :1671-1674
[2]   SECONDARY ION MASS-SPECTROMETRY OF BIOMOLECULES IN THE PICO-MOL AND FEMTO-MOL RANGE [J].
BENNINGHOVEN, A ;
NIEHUIS, E ;
FRIESE, T ;
GREIFENDORF, D ;
STEFFENS, P .
ORGANIC MASS SPECTROMETRY, 1984, 19 (07) :346-346
[3]  
Benninghoven A., 1987, SECONDARY ION MASS S, V86
[4]   TIME-OF-FLIGHT SECONDARY ION MASS-SPECTROMETRY OF POLYMERS IN THE MASS RANGE 500-10000 [J].
BLETSOS, IV ;
HERCULES, DM ;
VANLEYEN, D ;
BENNINGHOVEN, A .
MACROMOLECULES, 1987, 20 (02) :407-413
[5]   TIME-OF-FLIGHT SECONDARY ION MASS-SPECTROMETRY OF NYLONS - DETECTION OF HIGH MASS FRAGMENTS [J].
BLETSOS, IV ;
HERCULES, DM ;
GREIFENDORF, D ;
BENNINGHOVEN, A .
ANALYTICAL CHEMISTRY, 1985, 57 (12) :2384-2388
[6]   PERFORMANCE OF ELECTRON MULTIPLIERS IN FIM ATOM PROBES [J].
BRENNER, SS ;
MCKINNEY, JT .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1972, 43 (09) :1264-+
[7]   A TIME-OF-FLIGHT MASS-SPECTROMETER FOR MEASUREMENT OF SECONDARY ION MASS-SPECTRA [J].
CHAIT, BT ;
STANDING, KG .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1981, 40 (02) :185-193
[8]  
ECCLES AJ, 1988, SECONDARY ION MASS S, V6, P239
[9]  
HAGENHOFF B, 1988, SECONDARY ION MASS S, V6, P235
[10]  
KABERLINE S, 1988, SECONDARY ION MASS S, V6, P173
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