MECHANICAL STRENGTH AND TRIBOLOGICAL BEHAVIOR OF ION-BEAM-DEPOSITED BORON-NITRIDE FILMS ON NON-METALLIC SUBSTRATES

被引：33

作者：

MIYOSHI, K ^{[1
]}

BUCKLEY, DH ^{[1
]}

POUCH, JJ ^{[1
]}

ALTEROVITZ, SA ^{[1
]}

SLINEY, HE ^{[1
]}

机构：

[1] CASE WESTERN RESERVE UNIV, CLEVELAND, OH 44106 USA

来源：

SURFACE & COATINGS TECHNOLOGY | 1987年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0257-8972(87)90190-3

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：221 / 233

页数：13

共 21 条

[1]

Ahn J., 1978, Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, P134, DOI 10.1520/STP38630S

[2]

ALTEROVITZ SA, 1986, DIELECTRIC FILMS COM, P59

[3] MEASUREMENT OF ADHESION OF THIN FILMS [J].

BENJAMIN, P ;

WEAVER, C .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1960, 254 (1277) :163-176

[4]

BOWDEN FP, 1964, FRICTION LUBRICATI 2, P159

[5]

HINTERMANN HE, 1983, SCI HARD MATERIALS, P357

[6]

KATZ RN, 1985, INT J HIGH TECHNOL C, V1, P69

[7]

LAENG P, 1981, 8TH P INT C CHEM VAP, P723

[8]

LOOMIS WR, 1984, SOLID LIQUID LUBRICA, P33

[9] XPS, AES AND FRICTION STUDIES OF SINGLE-CRYSTAL SILICON-CARBIDE [J].

MIYOSHI, K ;

BUCKLEY, DH .

APPLICATIONS OF SURFACE SCIENCE, 1982, 10 (03) :357-376

[10] TRIBOLOGICAL PROPERTIES OF BORON-NITRIDE SYNTHESIZED BY ION-BEAM DEPOSITION [J].

MIYOSHI, K ;

BUCKLEY, DH ;

SPALVINS, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2340-2344

← 1 2 3 →