Studies of optical waveguide barium sodium niobate thin films

被引：4
作者：
Zhang, MS
Yin, Z
Zhang, P
Liu, JM
机构：
[1] National Laboratory of Solid State Microstructures, Nanjing University, Nanjing
[2] Center for Advanced Studies in Science and Technology of Microstructures, Nanjing
来源：
MICROELECTRONIC ENGINEERING | 1995年 / 29卷 / 1-4期
关键词：
D O I：
10.1016/0167-9317(95)00169-7
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Optical waveguide barium sodium niobate (BSN) films were grown on the substrate potassium titanyl phosphate (KTP) by pulsed laser deposition (PLD). The films were analysed by using X-ray diffraction, scanning electron microscopy and X-ray photoelectron spectroscopy. Both m lines of the TE and TM modes were recorded and a, propagation-loss of the BSN films of 1dB/cm was measured. The lattice-matching between BSN(110) and both KTP(010) and KTP(100), the refractive index and the constituents ratio of Ba:Na:Nb in the BSN films are discussed.
引用
收藏
页码：319 / 322
页数：4
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