THE FABRICATION AND CHARACTERIZATION OF ION-SENSITIVE FIELD-EFFECT TRANSISTORS WITH A SILICON DIOXIDE GATE

被引:21
作者
CHEN, SC
SU, YK
TZENG, JS
机构
[1] Natl Cheng Kung Univ, Tainan, Taiwan, Natl Cheng Kung Univ, Tainan, Taiwan
关键词
D O I
10.1088/0022-3727/19/10/020
中图分类号
O59 [应用物理学];
学科分类号
摘要
13
引用
收藏
页码:1951 / 1956
页数:6
相关论文
共 13 条
[1]   ISFETS USING INORGANIC GATE THIN-FILMS [J].
ABE, H ;
ESASHI, M ;
MATSUO, T .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) :1939-1944
[2]   ION-SENSITIVE FIELD-EFFECT TRANSISTORS WITH INORGANIC GATE OXIDE FOR PH SENSING [J].
AKIYAMA, T ;
UJIHIRA, Y ;
OKABE, Y ;
SUGANO, T ;
NIKI, E .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (12) :1936-1941
[4]  
BERGVELD P, 1972, IEEE T BIOMED ENG, V19, P64
[5]  
CHEUNG PW, 1978, THEORY DESIGN BIOMED, P91
[6]  
HEILAND G, 1982, SENSOR ACTUATOR, V2, P343, DOI 10.1016/0250-6874(81)80055-8
[7]   ELECTROKINETIC AND ADSORPTION STUDIES ON QUARTZ [J].
LI, HC ;
DEBRUYN, PL .
SURFACE SCIENCE, 1966, 5 (02) :203-&
[8]   SEMICONDUCTOR GAS SENSORS [J].
MORRISON, SR .
SENSORS AND ACTUATORS, 1982, 2 (04) :329-341
[9]   HYDROGEN, CALCIUM, AND POTASSIUM ION-SENSITIVE FET TRANSDUCERS - PRELIMINARY-REPORT [J].
MOSS, SD ;
JOHNSON, CC ;
JANATA, J .
IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1978, 25 (01) :49-54
[10]  
OESCH U, 1981, ANAL CHEM, V53, P1983, DOI 10.1021/ac00236a008