SELECTIVE METALORGANIC CHEMICAL VAPOR-DEPOSITION FOR GAAS PLANAR TECHNOLOGY

被引：36
|
作者：
NAKAI, K
OZEKI, M
机构：
来源：
JOURNAL OF CRYSTAL GROWTH | 1984年 / 68卷 / 01期
关键词：
D O I：
10.1016/0022-0248(84)90417-2
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：200 / 205
页数：6
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