EFFECT OF CONCENTRATION DEPENDENT SURFACE BINDING-ENERGY ON PREFERENTIAL SPUTTERING

被引：12

作者：

GOKTEPE, OF ^{[1
]}

ROUSH, ML ^{[1
]}

机构：

[1] UNIV MARYLAND,DEPT CHEM & NUCL ENGN,COLLEGE PK,MD 20742

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90473-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：803 / 807

页数：5

共 14 条

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[2] TRANSIENTS IN THE COMPOSITION OF MATERIAL SPUTTERED FROM ALLOY TARGETS [J].

ANDERSEN, HH ;

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :601-605

[3]

ANDERSEN HH, 1980, S PHYSICS IONIZED GA

[4]

ANDERSEN HH, 1984, ION IMPLANTATION BEA

[5]

ANDERSEN N, 1974, K DAN VIDENSK SELSK, V39

[6]

BRONGERSMA HH, 1980, NUCL INSTR METH, V170, P321

[7]

Coburn J. W., 1974, Critical Reviews in Solid State Sciences, V4, P561, DOI 10.1080/10408437308245843

[8]

GOKTEPE OF, MAT SCI ENG

[9] SIMPLE-MODEL FOR SURFACE-COMPOSITION CHANGES OF ALLOYS AND COMPOUNDS BY ION-BOMBARDMENT [J].

ISHITANI, T ;

TAMURA, H .

RADIATION EFFECTS LETTERS, 1979, 43 (4-5) :149-153

[10] SPUTTERING OF PTSI [J].

LIAU, ZL ;

MAYER, JW ;

BROWN, WL ;

POATE, JM .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (10) :5295-5305

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