SIMPLE SOURCE OF ATOMIC-HYDROGEN FOR ULTRAHIGH-VACUUM APPLICATIONS

被引:129
|
作者
BISCHLER, U
BERTEL, E
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 02期
关键词
D O I
10.1116/1.578754
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A simple doser for atomic hydrogen is described. It basically consists of a tungsten capillary which on the outlet is heated by electron bombardment to 1800-2000 K. This temperature is sufficient to achieve nearly total H-2 dissociation under relevant working pressures. The performance of the atomic hydrogen source was tested by H adsorption studies on Cu(110). The saturation coverage on this surface could be achieved with a nominal exposure which was smaller by a factor of approximately 10(-3) as compared to conventional methods of dissociation on a hot filament. The higher efficiency of the present H source greatly reduces the risk of sample contamination.
引用
收藏
页码:458 / 460
页数:3
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