ACTIVATION OF SILICON-OXIDE FILMS THROUGH HETEROPOLYCOMPOUNDS

被引：0
|
作者：
KRUTOVERTSEV, SA
SUBOCHEVA, OA
GRIGOREV, GA
SOROKIN, SI
MENSHIKOV, OD
机构：
来源：
ZHURNAL FIZICHESKOI KHIMII | 1990年 / 64卷 / 10期
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
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页码：2736 / 2740
页数：5
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