LASER RECRYSTALLIZATION AND HYDROGEN PLASMA ANNEALING OF ION-IMPLANTED POLYSILICON

被引：0
作者：
FANG, F
LIN, CL
SHEN, ZY
TSOU, SC
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期
关键词：
D O I：
10.1016/0168-583X(85)90579-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：348 / 351
页数：4
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