PROPERTIES OF CARBON-FILMS BY DC PLASMA DEPOSITION

被引：14
作者：
FUJII, K
SHOHATA, N
MIKAMI, M
YONEZAWA, M
机构：
来源：
APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 04期
关键词：
D O I：
10.1063/1.96168
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：370 / 372
页数：3
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