SUBMICROMETER LITHOGRAPHIC PATTERNING OF THIN GOLD-FILMS WITH A SCANNING TUNNELING MICROSCOPE

被引：56

作者：

STOCKMAN, L

NEUTTIENS, G

VANHAESENDONCK, C

BRUYNSERAEDE, Y

机构：

[1] Laboratorium voor Vaste Stof-Fysika en Magnetisme, Katholieke Universiteit Leuven, B-3001 Leuven

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 23期

关键词：

D O I：

10.1063/1.109202

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A scanning tunneling microscope (STM) has been used to locally expose Langmuir-Blodgett layers of a negative electron beam resist (omega-tricosenoic acid) on top of a thin gold film. The STM operates in a dry nitrogen atmosphere at a voltage difference of about -10 V between the electrochemically etched Pt-Ir tip and the gold surface. After development in ethanol, the unexposed areas of the gold film are removed by argon ion milling. Gold wires with a linewidth down to 15 nm have been prepared. Electrical transport measurements confirm the homogeneity and the one-dimensional metallic character at low temperatures of the gold structures.

引用

页码：2935 / 2937

页数：3

共 15 条

[1] IMAGING AND MODIFICATION OF POLYMERS BY SCANNING TUNNELING AND ATOMIC FORCE MICROSCOPY
ALBRECHT, TR
DOVEK, MM
LANG, CA
GRUTTER, P
QUATE, CF
KUAN, SWJ
FRANK, CW
PEASE, RFW
[J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (03) : 1178 - 1184
[2] BARRAUD A, 1979, SOLID STATE TECHNOL, V22, P120
[3] POLYMERIZED MONO-MOLECULAR LAYERS - A NEW CLASS OF ULTRATHIN RESINS FOR MICROLITHOGRAPHY
BARRAUD, A
ROSILIO, C
RUAUDELTEIXIER, A
[J]. THIN SOLID FILMS, 1980, 68 (01) : 91 - 98
[4] STRUCTURE AND REACTIVITY IN MONOMOLECULAR LANGMUIR-BLODGETT FILMS
BARRAUD, A
[J]. JOURNAL DE CHIMIE PHYSIQUE ET DE PHYSICO-CHIMIE BIOLOGIQUE, 1985, 82 (06) : 683 - 689
[5] SOLID-STATE ELECTRON-INDUCED POLYMERIZATION OF OMEGA-TRICOSENOIC ACID MULTILAYERS
BARRAUD, A
ROSILIO, C
RUAUDELTEIXIER, A
[J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1977, 62 (03) : 509 - 523
[6] WEAK LOCALIZATION AND CONDUCTANCE FLUCTUATIONS IN COMPLEX MESOSCOPIC GEOMETRIES
CHANDRASEKHAR, V
SANTHANAM, P
PROBER, DE
[J]. PHYSICAL REVIEW B, 1991, 44 (20) : 11203 - 11220
[7] SCANNING TUNNELING MICROSCOPE LITHOGRAPHY - A SOLUTION TO ELECTRON-SCATTERING
DOBISZ, EA
MARRIAN, CRK
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3024 - 3027
[8] SUB-30-NM LITHOGRAPHY IN A NEGATIVE ELECTRON-BEAM RESIST WITH A VACUUM SCANNING TUNNELING MICROSCOPE
DOBISZ, EA
MARRIAN, CRK
[J]. APPLIED PHYSICS LETTERS, 1991, 58 (22) : 2526 - 2528
[9] 4-PROBE RESISTANCE MEASUREMENTS OF NICKEL WIRES WRITTEN WITH A SCANNING TUNNELING MICROSCOPE SCANNING ELECTRON-MICROSCOPE SYSTEM
EHRICHS, EE
SMITH, WF
DELOZANNE, AL
[J]. ULTRAMICROSCOPY, 1992, 42 : 1438 - 1442
[10] LITHOGRAPHIC STUDIES OF AN E-BEAM RESIST IN A VACUUM SCANNING TUNNELING MICROSCOPE
MARRIAN, CRK
DOBISZ, EA
COLTON, RJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04): : 3563 - 3569

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