ELECTRICAL-PROPERTIES OF PLASMA-DEPOSITED POLYSILOXANE AND METAL PLASMA POLYSILOXANE GAAS STRUCTURES

被引：8
作者：
SEGUI, Y
MONTALAN, D
MORET, B
机构：
来源：
THIN SOLID FILMS | 1984年 / 120卷 / 01期
关键词：
D O I：
10.1016/0040-6090(84)90171-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：37 / 45
页数：9
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