DEPOSITION OF CHROMIUM FILMS BY MULTI-PHOTON DISSOCIATION OF CHROMIUM HEXACARBONYL

被引：45

作者：

MAYER, TM ^{[1
]}

FISANICK, GJ ^{[1
]}

EICHELBERGER, TS ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 12期

关键词：

D O I：

10.1063/1.330494

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：8462 / 8469

页数：8

共 15 条

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[4]

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EHRLICH, DJ ;

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[9] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS [J].

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[10] SPATIALLY DELINEATED GROWTH OF METAL-FILMS VIA PHOTOCHEMICAL PRE-NUCLEATION [J].

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