INDIUM-DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING

被引：15

作者：

SHIH, I

QIU, CX

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 06期

关键词：

D O I：

10.1063/1.335962

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2400 / 2401

页数：2

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共 4 条

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[4] TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF REACTIVE MAGNETRON SPUTTERING [J].

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APPLIED PHYSICS LETTERS, 1981, 39 (08) :640-642