PROPERTIES OF RF-SPUTTERED BERYLLIUM THIN-FILMS

被引：2

作者：

PAULSON, WM ^{[1
]}

LORIGAN, RP ^{[1
]}

机构：

[1] MOTOROLA INC,SEMICONDUCTOR RES & DEV LAB,PHOENIX,AZ 85001

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期

关键词：

D O I：

10.1116/1.569124

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：210 / 218

页数：9

共 50 条

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[50] The Role of Deposition Temperature in the Photovoltaic Properties of RF-Sputtered CdSe Thin Films [J].

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CRYSTALS, 2021, 11 (01) :1-13

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