THERMAL-SHOCK RESISTANCE OF SILICON-NITRIDE

被引:11
|
作者
ANZAI, K [1 ]
HASHIMOTO, H [1 ]
机构
[1] TOKYO SHIBAURA ELECT CO LTD,TOSHIBA RES & DEV CTR,KAWASAKI,JAPAN
关键词
D O I
10.1007/BF00552260
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:2351 / 2353
页数:3
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