TECHNOLOGY AND APPLICATIONS OF GRATING INTERFEROMETERS IN HIGH-PRECISION MEASUREMENT

被引：113

作者：

TEIMEL, A

机构：

[1] Dr. Johannes Heidenhahn GmbH, Traunreut

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1992年 / 14卷 / 03期

关键词：

GRATING INTERFEROMETER; POSITION MEASUREMENT; INTERFERENTIAL SCALES; ZERODUR SCALES;

D O I：

10.1016/0141-6359(92)90003-F

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In terms of resolution and measuring accuracy, the grating interferometers that have appeared on the market during the past few years are often superior to He-Ne laser interferometers operating in air under workshop conditions. Several specific advantages such as good stability under changing ambient air conditions and the ability to match the thermal expansion coefficient to individual applications by means of the choice of the scale carrier material are leading to increased use of these systems in high-precision measurement. This paper describes the operating principle and characteristics of grating interferometers as well as some measuring systems that have been realized based on this technology.

引用

页码：147 / 154

页数：8

共 8 条

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