SPUTTERED W-N DIFFUSION-BARRIERS

被引：107

作者：

KATTELUS, HP ^{[1
]}

KOLAWA, E ^{[1
]}

AFFOLTER, K ^{[1
]}

NICOLET, MA ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.572901

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2246 / 2254

页数：9

共 36 条

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